Product Details
Place of Origin: CHINA
Brand Name: ZMSH
Certification: rohs
Model Number: SiC 4H-P
Payment & Shipping Terms
Price: by case
Payment Terms: T/T
Supply Ability: 1000pc/month
Polytype: |
4H-P |
Density: |
3.23 G/cm3 |
Resistivity: |
≤0.1 Ω.cm |
Mohs Hardness: |
≈9.2 |
Surface Orientation: |
Off Axis: 2.0°-4.0°toward [1120] ± 0.5° |
Roughness: |
Polish Ra≤1 Nm |
Packaging: |
Multi-wafer Cassette Or Single Wafer Container |
Application: |
Electric Cars, Smart Grids |
Polytype: |
4H-P |
Density: |
3.23 G/cm3 |
Resistivity: |
≤0.1 Ω.cm |
Mohs Hardness: |
≈9.2 |
Surface Orientation: |
Off Axis: 2.0°-4.0°toward [1120] ± 0.5° |
Roughness: |
Polish Ra≤1 Nm |
Packaging: |
Multi-wafer Cassette Or Single Wafer Container |
Application: |
Electric Cars, Smart Grids |
4H-P silicon carbide (SiC) substrate is a high performance semiconductor material with a unique hexagonal lattice structure. Its "4H" indicates the type of crystal structure of the material, while "P-type" refers to the P-type conductivity obtained by doping elements such as aluminum. The 4.0° off-axis design further optimizes its electrical and thermal performance, giving it significant advantages in high temperature, high frequency and high power electronics.
6 inch diameter Silicon Carbide (SiC) Substrate Specification
等级Grade |
精选级(Z 级) Zero MPD Production Grade (Z Grade) |
工业级(P 级) Standard Production Grade (P Grade) |
测试级(D 级) Dummy Grade (D Grade) |
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直径 Diameter | 145.5 mm~150.0 mm | ||||
厚度 Thickness | 350 μm ± 25 μm | ||||
晶片方向 Wafer Orientation |
- Off axis: 2.0°-4.0°toward [1120] ± 0.5° for 4H/6H-P, On axis:〈111〉± 0.5° for 3C-N |
||||
微管密度 ※ Micropipe Density | 0 cm-2 | ||||
电 阻 率 ※ Resistivity | p-type 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
n-type 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
主定位边方向 Primary Flat Orientation | 4H/6H-P |
- {1010} ± 5.0° |
|||
3C-N |
- {110} ± 5.0° |
||||
主定位边长度 Primary Flat Length | 32.5 mm ± 2.0 mm | ||||
次定位边长度 Secondary Flat Length | 18.0 mm ± 2.0 mm | ||||
次定位边方向 Secondary Flat Orientation | Silicon face up: 90° CW. from Prime flat ± 5.0° | ||||
边缘去除 Edge Exclusion | 3 mm | 6 mm | |||
局部厚度变化/总厚度变化/弯曲度/翘曲度 LTV/TTV/Bow /Warp | ≤2.5 μm/≤5 μm/≤15 μm/≤30 μm | ≤10 μm/≤15 μm/≤25 μm/≤40 μm | |||
表面粗糙度 ※ Roughness | Polish Ra≤1 nm | ||||
CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
边缘裂纹(强光灯观测) Edge Cracks By High Intensity Light | None | Cumulative length ≤ 10 mm, single length≤2 mm | |||
六方空洞(强光灯测) ※ Hex Plates By High Intensity Light | Cumulative area ≤0.05% | Cumulative area ≤0.1% | |||
多型(强光灯观测) ※ Polytype Areas By High Intensity Light | None | Cumulative area≤3% | |||
目测包裹物(日光灯观测) Visual Carbon Inclusions | Cumulative area ≤0.05% | Cumulative area ≤3% | |||
硅面划痕(强光灯观测) # Silicon Surface Scratches By High Intensity Light | None | Cumulative length≤1×wafer diameter | |||
崩边(强光灯观测) Edge Chips High By Intensity Light | None permitted ≥0.2mm width and depth | 5 allowed, ≤1 mm each | |||
硅面污染物(强光灯观测) Silicon Surface Contamination By High Intensity | None | ||||
包装 Packaging | Multi-wafer Cassette or Single Wafer Container |
Notes:
※ Defects limits apply to entire wafer surface except for the edge exclusion area. # The scratches should be checked on Si face only.
1. Q: What is the effect of 4.0° off-axis on the performance of silicon carbide substrate?
A: Off-axis cutting helps to improve the electrical and mechanical properties of the SIC substrate, such as increasing carrier mobility and optimizing surface topography, thereby improving the performance and reliability of the device.
2. Q: What is the difference between the silicon carbide substrate 4H-P off-axis to 4.0° and the standard axial substrate?
A: A 4.0° off-axis substrate may have better electrical and mechanical properties, such as higher carrier mobility and better surface topography, but the specific differences need to be determined according to the application scenario and device design.
Tag: #Sic wafer, #silicon carbide substrate, #4H-P type, #Off axis: 2.0°-4.0°toward, #Sic 4H-P type